A matrix type piezoelectric/electrostrictive device in which a plurality of piezoelectric/electrostrictive elements almost in a pillar shape, each having a piezoelectric/electrostrictive substance and at least a pair of electrodes, are vertically provided on a thick ceramic substrate, and which is driven...http://www.google.com.au/patents/US20030098632?utm_source=gb-gplus-sharePatent US20030098632 - Matrix type piezoelectric/electrostrictive device and manufacturing method thereof
