A MEMS structure is provided having a cap that encapsulates and protects the fragile components of the device, while having an electrical trace embedded in a nonconductive substrate. The electrical trace includes a first terminal end that is exposed to the peripheral region of the device, and a second...http://www.google.com.au/patents/US20020159218?utm_source=gb-gplus-sharePatent US20020159218 - Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap
