A single-sided differential pressure sensing chip having a cavity formed in the top surface of a substrate, a deformable diaphragm spanning the cavity, and a pressure passage connecting the top surface of the substrate with the cavity, and a method of making the same are described. A first fluid pressure...http://www.google.com.au/patents/US5969591?utm_source=gb-gplus-sharePatent US5969591 - Single-sided differential pressure sensor
