A planarization method includes providing an aluminum-containing surface and positioning it for contact with a fixed abrasive article in the presence of a composition preferably including a surfactant, a complexant, and an oxidant, wherein the solution has a pH of less than about 10....http://www.google.com.au/patents/US6429133?utm_source=gb-gplus-sharePatent US6429133 - Composition compatible with aluminum planarization and methods therefore
