A micro-zero insertion force socket is fabricated capable of connecting pins with diameters of 25 to 200 microns and minimum pitches of from 3:1 to 10:1 using micro-fabrication techniques, MEMS components, and high-density interconnections....http://www.google.com.au/patents/US6322374?utm_source=gb-gplus-sharePatent US6322374 - Micro-zero insertion force socket
