An ion shower system is disclosed and comprises a plasma source operable to generate source gas ions within a chamber. The plasma source further comprises a plurality of conductor segments and a plurality of capacitors, wherein the conductor segments are serially connected through the plurality of capacitors....http://www.google.com.au/patents/US7748344?utm_source=gb-gplus-sharePatent US7748344 - Segmented resonant antenna for radio frequency inductively coupled plasmas
