The present invention provides a method of manufacturing a three-dimensional structure having portions different in thickness, the method comprising forming a laminated structure, which comprises at least two layers to be processed and at least one inner mask interposed between the layers, the layers...http://www.google.com.au/patents/US6730534?utm_source=gb-gplus-sharePatent US6730534 - Method of manufacturing three-dimensional structure and method of manufacturing oscillator
