A process for making thin-film batteries including the steps of cleaning a glass or silicon substrate having an amorphous oxide layer several microns thick; defining with a mask the layer shape when depositing cobalt as an adhesion layer and platinum as a current collector; using the same mask as the...http://www.google.com.au/patents/US6558836?utm_source=gb-gplus-sharePatent US6558836 - Structure of thin-film lithium microbatteries
