A capacitance type humidity detecting sensor has two electrodes opposing each other with a gap interposed therebetween to form a capacitor on a silicon substrate with a silicon oxide film formed on a surface thereof. A moisture-sensitive film is formed so as to cover the two electrodes with a silicon...http://www.google.com.au/patents/US6580600?utm_source=gb-gplus-sharePatent US6580600 - Capacitance type humidity sensor and manufacturing method of the same
