A method and apparatus for designing a differential pressure sense die based on a unique silicon piezoresistive technology for sensing low differential pressure in harsh duty applications is disclosed. The pressure sense die comprises of an etched pressure diaphragm and a hole that is drilled through...http://www.google.com.au/patents/US7644625?utm_source=gb-gplus-sharePatent US7644625 - Differential pressure sense die based on silicon piezoresistive technology
