A series of conductive layers separated by interlayer gaps is formed adjacent a substrate layer, the conductive layer and interlayer gap dimensions defining aspect ratios for trenches between the conductive layers. A layer of dielectric material is deposited over the conductive layers using plasma enhanced...http://www.google.com.au/patents/US7009272?utm_source=gb-gplus-sharePatent US7009272 - PECVD air gap integration
