A microfluidic delivery system substrate is coated with ultra-nanocrystalline diamond (UNCD) or with a thin ceramic film, such as alumina or zirconia, that is applied by ion-beam assisted deposition; assuring that the device is impermeably sealed, to prevent the substrate from being dissolved by hostile...http://www.google.com.au/patents/US7097775?utm_source=gb-gplus-sharePatent US7097775 - Coated microfluidic delivery system
