An apparatus and method for sensing chemical and/or biological analytes includes a deflectable arm of a microcantilever at least partially embedded within a sensing element. A gaseous or liquid medium which may include the analyte being detected is introduced to the sensing element. The sensing element...http://www.google.com.au/patents/US6854317?utm_source=gb-gplus-sharePatent US6854317 - Embedded piezoelectric microcantilever sensors
