Method for recovering treated metal silicide surfaces or layers are provided. In at least one embodiment, a substrate having an at least partially oxidized metal silicide surface disposed thereon is cleaned to remove the oxidized regions to provide an altered metal silicide surface. The altered metal...http://www.google.com.au/patents/US7550381?utm_source=gb-gplus-sharePatent US7550381 - Contact clean by remote plasma and repair of silicide surface
