A method of detecting a fault within a micro electro-mechanical device is provided. The micro electro-mechanical device has a support structure and an actuating arm that is movable relative to the support structure because of thermal expansion of at least part of the actuating arm caused by heat inducing...http://www.google.com.au/patents/US8038252?utm_source=gb-gplus-sharePatent US8038252 - Method of detecting MEM device faults with single current pulse
