A reticle (23) with a pellicle is movably set on a reticle support table (28). An inert gas supply portion (29) and inert gas exhaust portion (37) are so driven as to sandwich a pellicle frame (25), and align the pellicle frame (25). The inert gas supply portion (29) and inert gas exhaust portion (37)...http://www.google.com.au/patents/US6803996?utm_source=gb-gplus-sharePatent US6803996 - Device manufacturing-related apparatus, gas purge method, and device manufacturing method
