In a semiconductor chip for Si chip based liquid crystal having insulating films and interconnection layers formed on a semiconductor substrate, a thin interconnection layer made of TiN/Ti having strong erosion resistance is formed on an uppermost interlayer insulating film having a flat surface to substantially...http://www.google.com.au/patents/US6049132?utm_source=gb-gplus-sharePatent US6049132 - Multiple metallization structure for a reflection type liquid crystal display
