An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring...http://www.google.com.au/patents/US7567373?utm_source=gb-gplus-sharePatent US7567373 - System and method for micro-electromechanical operation of an interferometric modulator
