An inspection device and method that closely approximates a visual inspection technique for evaluating the quality of a sample. A mask image generation section generates a master image from an image signal of a known good sample. The image signal is used to a first mask image. A plurality of second mask...http://www.google.com.au/patents/US5555315?utm_source=gb-gplus-sharePatent US5555315 - Pinhole inspection device and method
