A means of effectively applying an organic EL material application liquid with good application liquid cut-off is provided. A heater and an ultrasonic oscillator are formed in a thin film formation apparatus when applying the application liquid, and heat and ultrasonic oscillations are imparted to the...http://www.google.com.au/patents/US7279194?utm_source=gb-gplus-sharePatent US7279194 - Thin film formation apparatus and method of manufacturing self-light-emitting device using thin film formation apparatus
