An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly linear lamps for emitting light energy onto a wafer. The linear lamps can be placed in various configurations. In accordance with the present invention, tuning devices...http://www.google.com.au/patents/US7847218?utm_source=gb-gplus-sharePatent US7847218 - System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
