Scavengers for removing acidic or corrosive gaseous components from semiconductor process effluents comprising a metallic macromer comprising a coordinated complex of (i) metal coordination atoms linked to (ii) oxomeric moieties selected from the group consisting of carbonate, sulfite,...http://www.google.com.au/patents/US5777058?utm_source=gb-gplus-sharePatent US5777058 - Metallo-oxomeric scrubber compositions
