A method and resulting structure for a relative humidity monitor which can be built into an integrated circuit chip. A small area on a silicon chip is made porous by anodic etching. This region is then oxidized and a metal counter electrode is deposited over part of the porous area. The surface area...http://www.google.com.au/patents/US4057823?utm_source=gb-gplus-sharePatent US4057823 - Porous silicon dioxide moisture sensor and method for manufacture of a moisture sensor
