There is provided a method used for processing an organic low dielectric constant insulating film to a desired shape for enabling facilitated stripping of an organic film formed on top of the organic low dielectric constant insulating film. Specifically, there is provided a method for stripping an organic...http://www.google.com.au/patents/US6352937?utm_source=gb-gplus-sharePatent US6352937 - Method for stripping organic based film
