The invention provides a microfabrication process which may be used to manufacture a MEMS device. The process comprises depositing one or a stack of layers on a base layer, said one layer or an uppermost layer in said stack of layers being a sacrificial layer; patterning said one or a stack of layers...http://www.google.com.au/patents/US6794119?utm_source=gb-gplus-sharePatent US6794119 - Method for fabricating a structure for a microelectromechanical systems (MEMS) device
