Process for the local passivation of a substrate by a hydrogenated amorphous carbon layer and process for producing thin film transistors on said passivated substrate. The local passivation process consists of producing photosensitive resin patterns (3) on the substrate (1), subjecting the structure...http://www.google.com.au/patents/US5250451?utm_source=gb-gplus-sharePatent US5250451 - Process for the production of thin film transistors
