A micro-electromechanical shutter assembly includes an elongate actuator that is anchored at one end to the wafer substrate to be in electrical contact with the drive circuitry layers. A closure member is mounted on an opposite end of the elongate actuator. The actuator is configured to receive an electrical...http://www.google.com.au/patents/US20040257403?utm_source=gb-gplus-sharePatent US20040257403 - Micro-electromechanical valve shutter assembly
