An alignment mark on a substrate for aligning the substrate includes a plurality of mark portions having different levels relative to the surface of the substrate. A method of aligning a substrate when a pattern on a mask is to be transferred onto the substrate includes forming an alignment mark on a...http://www.google.com.au/patents/US5406373?utm_source=gb-gplus-sharePatent US5406373 - Alignment mark and aligning method using the same
