A microelectromechanical device comprises first and second beam members that have respective first ends connected to anchors, and that are also connected together. The first and second beam members are connected to a dielectric tether by a first tether anchor. The microelectromechanical device further...http://www.google.com.au/patents/US6407478?utm_source=gb-gplus-sharePatent US6407478 - Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature
