End effectors, apparatuses including end effectors for conditioning planarizing pads, and methods for manufacturing end effectors with contact elements to condition planarizing pads used in polishing micro-device workpieces are disclosed herein. In one embodiment, an end effector includes a member having...http://www.google.com.au/patents/US7189333?utm_source=gb-gplus-sharePatent US7189333 - End effectors and methods for manufacturing end effectors with contact elements to condition polishing pads used in polishing micro-device workpieces
