One embodiment of the present invention is a process for etching an organic anti-reflective coating on a base of a substrate, the process including steps of: (a) placing the substrate into a processing chamber; (b) introducing into the processing chamber a processing gas including one or more of carbon...http://www.google.com.au/patents/US6649532?utm_source=gb-gplus-sharePatent US6649532 - Methods for etching an organic anti-reflective coating
