A method of processing a substrate having the steps of placing a substrate for forming an LCD on a support, mounting a cover on the substrate in such a manner that a clearance is formed from at least either surface of the substrate placed on the support, introducing developer or pure water into the...http://www.google.com.au/patents/US5853961?utm_source=gb-gplus-sharePatent US5853961 - Method of processing substrate and apparatus for processing substrate
