According to an aspect of the present invention, there is provided an inspection apparatus using an optical interferometer including splitting and combining means (3) for splitting light from a light source (1) into incident light (41) irradiated on a sample and reference light (40) and combining signal...http://www.google.com.au/patents/US6381015?utm_source=gb-gplus-sharePatent US6381015 - Inspection apparatus using optical interferometer
