A showerhead disperser device for mixing plural vapor streams, comprising: a housing including front and rear walls in spaced apart relation to one another, and a side wall therebetween, defining within the housing an interior volume; the front wall having a multiplicity of vapor mixture discharge openings...http://www.google.com.au/patents/US6010748?utm_source=gb-gplus-sharePatent US6010748 - Method of delivering source reagent vapor mixtures for chemical vapor deposition using interiorly partitioned injector
