A micro-electromechanical valve is provided having a channel defined by a substrate and circuitry thereon so as to terminate at an aperture, a closure member arranged to be displaceable between first and second positions at which the aperture is respectively covered and uncovered and fluid is respectively...http://www.google.com.au/patents/US7152960?utm_source=gb-gplus-sharePatent US7152960 - Micro-electromechanical valve having transformable valve actuator
