A system and methods for handling semiconductor wafers and dummy wafers in semiconductor process equipment such as an ion implanter. Tray assemblies are provided, each of which is adapted for releasably holding and automatically aligning a standard semiconductor wafer cassette next to a dedicated dummy-wafer...http://www.google.com.au/patents/US4776744?utm_source=gb-gplus-sharePatent US4776744 - Systems and methods for wafer handling in semiconductor process equipment
