A method of fabricating and the structure of a micro-electromechanical switch (MEMS) device provided with self-aligned spacers or bumps is described. The spacers are designed to have an optimum size and to be positioned such that they act as a detent mechanism for the switch to minimize problems caused...http://www.google.com.au/patents/US6621392?utm_source=gb-gplus-sharePatent US6621392 - Micro electromechanical switch having self-aligned spacers
