An improved support post (16, 23, 25) for micro-mechanical devices (10). A via (34a) that defines the outer surface of the support post (16) is etched into a spacer layer (34). An oxide layer (41) is conformally deposited over the spacer layer (34) and into the via (34a), and then etched back to the...http://www.google.com.au/patents/US5485304?utm_source=gb-gplus-sharePatent US5485304 - Support posts for micro-mechanical devices
