A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS...http://www.google.com.au/patents/US6324748?utm_source=gb-gplus-sharePatent US6324748 - Method of fabricating a microelectro mechanical structure having an arched beam
