A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and...http://www.google.com.au/patents/US7442918?utm_source=gb-gplus-sharePatent US7442918 - MEMS device having simplified drive
