Method of fabricating thin-film transistors in which contact with connecting electrodes becomes reliable. When contact holes are formed, the bottom insulating layer is subjected to a wet etching process, thus producing undercuttings inside the contact holes. In order to remove the undercuttings, a light...http://www.google.com.au/patents/US5940732?utm_source=gb-gplus-sharePatent US5940732 - Method of fabricating semiconductor device
