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It is intended to perform optimum autofocusing and autoleveling control in a scanning exposure apparatus....
http://www.google.com.au/patents/US6400456?utm_source=gb-gplus-share
Patent US6400456 - Plane positioning apparatus
Plane positioning apparatus
Takashi Miyachi
Overview
Abstract
Drawings
Description
Claims
Patent number
: 6400456
Filing date
: 27 Oct 2000
Issue date
: 4 Jun 2002
Application number
: 09/697,357
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