A defect inspection apparatus includes a movable stage for mounting a substrate having circuit patterns as an object of inspection, an irradiation optical system which irradiates a slit-shaped light beam from an oblique direction to the circuit patterns of the substrate, a detection optical system which...http://www.google.com.au/patents/US7768635?utm_source=gb-gplus-sharePatent US7768635 - Apparatus and method for inspecting defects
