A moisture sensor includes interdigitated first and second electrodes formed in trenches A porous low-k dielectric is provided between the electrodes. The electrodes are of Cu surrounded by a barrier layer to protect the Cu from corrosion. TiN may be used as barrier layer and selectively deposited barrier...http://www.google.com.au/patents/US8079248?utm_source=gb-gplus-sharePatent US8079248 - Moisture sensor
