Systems and methods for reducing a surface roughness of a polycrystalline or single crystal thin film produced by the sequential lateral solidification process are disclosed. In one arrangement, the system includes an excimer laser for generating a plurality of excimer laser pulses of a predetermined...http://www.google.com.au/patents/US7704862?utm_source=gb-gplus-sharePatent US7704862 - Surface planarization of thin silicon films during and after processing by the sequential lateral solidification method
