An article storage house in a clean room for airtightly accommodating a wafer cassette, etc. in which the wafer cassette carried in from the outside of an article carry-in/out portion is accommodated into a container by an automatic article delivery unit disposed in the article carry-in/out portion or...http://www.google.com.au/patents/US5363867?utm_source=gb-gplus-sharePatent US5363867 - Article storage house in a clean room
