A method of making a micro electro-mechanical switch or tunneling sensor. A cantilevered beam structure and a mating structure are defined on a first substrate or wafer; and at least one contact structure and a mating structure are defined on a second substrate or wafer, the mating structure on the second...http://www.google.com.au/patents/US6630367?utm_source=gb-gplus-sharePatent US6630367 - Single crystal dual wafer, tunneling sensor and a method of making same
