An apparatus 115 for processing a substrate 20, comprises an integrated pumping system 155 having a high operating efficiency, small size, and low vibrational and noise levels. The apparatus 115 comprises a chamber, such as a load-lock chamber 110, transfer chamber 115, or process chamber 120. An integrated...http://www.google.com.au/patents/US7051759?utm_source=gb-gplus-sharePatent US7051759 - Processing apparatus having integrated pumping system
