A weighting function is obtained to enhance measured diffraction signals used in optical metrology. To obtain the weighting function, a measured diffraction signal is obtained. The measured diffraction signal was measured from a site on a wafer using a photometric device. A first weighting function is...http://www.google.com.au/patents/US7523021?utm_source=gb-gplus-sharePatent US7523021 - Weighting function to enhance measured diffraction signals in optical metrology
