A method of manufacturing a fluidic channel through a substrate includes etching an exposed section on a first surface of the substrate, and coating the etched section of the substrate. The etching and the coating are alternatingly repeated until the fluidic channel is formed....http://www.google.com.au/patents/US6555480?utm_source=gb-gplus-sharePatent US6555480 - Substrate with fluidic channel and method of manufacturing
